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University of Illinois at Urbana-Champaign
Micromachined, Out-of-Plane Micro Flow Sensors
Abstract
dc:descriptionIn addition, we use the fabrication platform to integrate 8 sensor array with on-chip signal conditioning using a commercial operational amplifier circuit. A new method to make the sensor array flexible is also proposed.
Degree
thesis:*- Name thesis:degree_name
- Ph.D.
- Level thesis:degree_level
- Dissertation
- Discipline thesis:degree_discipline
- Electrical Engineering
- Grantor
- University of Illinois at Urbana-Champaign
- Year dc:date
- 2015
Author and committee
dc:creator, dc:contributor.*- Author dc:creator
-
- Chen, Jack
- Contributors dc:contributor
-
- Chang Liu
Subjects
dc:subject × 1Rights
- Language dc:language
- eng
Identifiers
dc:identifier.*- Identifier
- (MiAaPQ)AAI3182236
- OAI identifier oai:identifier
- oai:www.ideals.illinois.edu:2142/80901