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University of Illinois at Urbana-Champaign

Ohmic Contacts to N -Type Gallium Nitride Based Semiconductors

Abstract

dc:description

In this work, the development and characterization of electrical and materials performance of ohmic contacts are presented. Surface treatment techniques were developed to improve the electrical characteristics of ohmic contacts. Ti/Al/Mo/Au metallization scheme was developed to form ohmic contacts to n-GaN, n-AlxGa1-xN, and AlGaN/GaN HEMTs. Materials microstructural analysis techniques were used to understand the evolution of electrical behavior of these contacts at higher temperatures.

Degree

thesis:*
Name thesis:degree_name
Ph.D.
Level thesis:degree_level
Dissertation
Discipline thesis:degree_discipline
Electrical Engineering
Grantor
University of Illinois at Urbana-Champaign
Year dc:date
2015

Author and committee

dc:creator, dc:contributor.*
Author dc:creator
  • Selvanathan, Deepak
Contributors dc:contributor
  • Adesida, Ilesanmi

Subjects

dc:subject × 1

Rights

Language dc:language
eng

Identifiers

dc:identifier.*
Identifier
(MiAaPQ)AAI3131020
OAI identifier oai:identifier
oai:www.ideals.illinois.edu:2142/80864

Chain of custody

source
Harvested from
University of Illinois - Urbana-Champaign
Base URL
www.ideals.illinois.edu/oai-pmh
Last updated
2026-07-22
Source record
OAI-PMH GetRecord
citation

Selvanathan, Deepak. Ohmic Contacts to N -Type Gallium Nitride Based Semiconductors. Dissertation thesis, University of Illinois at Urbana-Champaign, 2015. http://hdl.handle.net/2142/80864