Microelectromechanical Systems (Mems) for Radio Frequency Applications

The work in this thesis focuses on the development of two of the most fundamental on-chip RF passive devices (tunable capacitors and inductors) using micromachining technology. First, a new wide-tuning-range tunable capacitor design is proposed and prototype devices are fabricated using surface micromachining technology. This new tunable capacitor has the advantages of simple configuration, IC-compatible fabrication process, low loss, and wide tuning range. Second, a novel three-dimensional (3-D) microstructure assembly technique, Plastic Deformation Magnetic Assembly (PDMA), is developed, which is compatible with the standard IC fabrication process and capable of addressing batch-scale assembly with high yield and good controllability. Using PDMA, on-chip vertical spiral inductors are demonstrated. Vertical spiral inductors have almost zero footprints and have much higher quality factors and self-resonance frequencies than their horizontal counterparts due to reduced substrate loss and parasitics. On-chip solenoid inductors with different windings are also demonstrated using PDMA.

Name thesis:degree_name

Ph.D.

Level thesis:degree_level

Dissertation

Discipline thesis:degree_discipline

Electrical Engineering

Grantor

University of Illinois at Urbana-Champaign

Year dc:date

2015

Author dc:creator

• Zou, Jun

Contributors dc:contributor

• Chang Liu

• Engineering, Electronics and Electrical

Language dc:language

eng

Identifier

(MiAaPQ)AAI3044278

OAI identifier oai:identifier

oai:www.ideals.illinois.edu:2142/80774