Simulation of Rarefied Flows in MEMS Devices by Atomistic and Multiscale Methods

To reduce to computational cost associated with such analysis, multiscale coupling of DSMC with the continuum models for fluid flow is studied. The Schwarz alternating method is utilized for coupling, and the continuum equations are solved using the finite cloud method. The agreement of the coupled method with DSMC is shown and the dependence of the convergence of the DSMC/Stokes coupling on the overlap, DSMC noise, and the number of DSMC time steps is investigated. Significant computational time savings are demonstrated with the coupled method. The coupling of DSMC with compressible Navier-Stokes equations is also developed. It is shown that by using DSMC/Navier-Stokes coupling, the computational time savings can be increased. The agreement of the results of DSMC/Navier-Stokes coupling with DSMC is shown for pressure, velocity and temperature.

Name thesis:degree_name

Ph.D.

Level thesis:degree_level

Dissertation

Discipline thesis:degree_discipline

Electrical Engineering

Grantor

University of Illinois at Urbana-Champaign

Year dc:date

2015

Author dc:creator

• Aktas, Ozgur

Contributors dc:contributor

• Narayan Aluru
• Ravaioli, Umberto

• Engineering, Electronics and Electrical

Language dc:language

eng

Identifier

(MiAaPQ)AAI3030401

OAI identifier oai:identifier

oai:www.ideals.illinois.edu:2142/80746