Measurement and model of a radio frequency microelectromechanical switch

A novel process for the fabrication of microelectromechanical systems (MEMS) has been introduced. One potential application of this process is a radio frequency (RF) MEMS switch. This thesis provides an overview of the measurement and modeling techniques used to verify the functionality of an RF MEMS switch that was fabricated using this process. This thesis confirms that this specific RF MEMS design was not fully functioning, but can still be measured, characterized, and modeled.

Name thesis:degree_name

M.S.

Level thesis:degree_level

Thesis

Discipline thesis:degree_discipline

Electrical & Computer Engr

Grantor

University of Illinois at Urbana-Champaign

Year dc:date

2015

Author dc:creator

• Handler, Drew E

• microelectromechanical systems (MEMS)
• radio frequency (RF)
• S-parameter

Statement dc:rights

• Copyright 2015 Drew Handler

Language dc:language

en

Handle dc:identifier

http://hdl.handle.net/2142/78364

OAI identifier oai:identifier

oai:www.ideals.illinois.edu:2142/78364