Microassembly via polymeric stamp-based transfer printing

This thesis aims to study microassembly of micro-scale objects involving transfer printing and its applications. Conventional top-down monolithic microfabrication schemes puts many limitations on fabricating structures with complex device architectures or packaging schemes. As such, engineering approaches enabling microassembly of multiple micro-machined components becomes highly desirable to complement conventional microfabrication. Polydimethylsiloxane (PDMS) or shape memory polymer (SMP) as “stamp material,” working in conjunction with 3-dimensional positioning stage, provides reliable and precise relocation method of a micro-scale object for device assembly. Theoretical approaches are studied and experimental assembly processes are performed. Micro-scale structures of various geometries have been assembled in a systematic manner for demonstration. In addition, nano-membrane resonant structure have been demonstrated for functioning device applications.

Name thesis:degree_name

M.S.

Level thesis:degree_level

Thesis

Discipline thesis:degree_discipline

Mechanical Engineering

Grantor

University of Illinois at Urbana-Champaign

Year dc:date

2015

Author dc:creator

• Rhee, Sang Il

Contributors dc:contributor

• Kim, Seok

• transfer printing
• microassembly
• shape memory polymer
• polydimethylsiloxane (PDMS) stamp

Statement dc:rights

• Copyright 2014 Sang Il Rhee

Language dc:language

en

Handle dc:identifier

http://hdl.handle.net/2142/73095

OAI identifier oai:identifier

oai:www.ideals.illinois.edu:2142/73095