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University of Illinois at Urbana-Champaign

Biocompatible silicon nitride thin films for self-rolled-up microtube technologies: guiding neurons

Abstract

dc:description

This thesis presents the evolution and optimization of a self-rolled-up membrane (s-RUM) that is not only insulating, but transparent and biocompatible, allowing it to be integrated into conductance, photonics, and strain-based sensor systems. These microtube-forming membranes are easily fabricated and can be integrated into a microfluidic channel (or become the channel itself) which can be easily integrated into an intravenous or catheter tube for diagnostics. Taking advantage of SiNx’s insulting properties allows conductance-based biosensors to be integrated into the same channel as a surface-enhanced Raman spectroscopy (SERS) sensor. Further, analyte size exclusion is possible via diameter variation and surface functionalization, adding another degree of precision. Extending this platform beyond sensing to cellular growth guidance, we find properties unique to this material system and superior to existing platforms. The SiNx s-RUM platform can be used for applications from sensing to culturing, from disposable electronics to implants, and from brain-computer interfaces to stem-cell functionalized stints.

Degree

thesis:*
Name thesis:degree_name
M.S.
Level thesis:degree_level
Thesis
Discipline thesis:degree_discipline
Electrical & Computer Engr
Grantor
University of Illinois at Urbana-Champaign
Year dc:date
2015

Author and committee

dc:creator, dc:contributor.*
Author dc:creator
  • Froeter, Paul
Contributors dc:contributor
  • Li, Xiuling

Subjects

dc:subject × 3

Rights

dc:rights
Statement dc:rights
  • Copyright 2014 Paul Froeter
Language dc:language
en

Identifiers

dc:identifier.*
Handle dc:identifier
http://hdl.handle.net/2142/73027
OAI identifier oai:identifier
oai:www.ideals.illinois.edu:2142/73027

Chain of custody

source
Harvested from
University of Illinois - Urbana-Champaign
Base URL
www.ideals.illinois.edu/oai-pmh
Last updated
2026-07-22
Source record
OAI-PMH GetRecord
citation

Froeter, Paul. Biocompatible silicon nitride thin films for self-rolled-up microtube technologies: guiding neurons. Thesis thesis, University of Illinois at Urbana-Champaign, 2015. http://hdl.handle.net/2142/73027