STM Lateral Micropositioning: A Tool for Nanofabrication

A concentric tube scanning tunneling microscope (STM) has been fitted with a lateral micropositioning device in order to allow imaging of surfaces over a range of a few millimeters. The probe is mounted on a stage which uses the principle of piezoelectric inertial translation to produce a controlled stepping motion along two axes. The stage is driven by signals already supplied to the STM, is insensitive to vibration, and is UHV compatible. A position sensor can be attached to the stage to provide a coordinate readout of its position and has been used to study the dynamics of the stage motion. The micropositioning capability has been demonstrated by using it to locate semiconductor device structures.

Name thesis:degree_name

Ph.D.

Level thesis:degree_level

Dissertation

Discipline thesis:degree_discipline

Electrical Engineering

Grantor

University of Illinois at Urbana-Champaign

Year dc:date

2014

Author dc:creator

• Brockenbrough, Roger Thomas

Contributors dc:contributor

• Lyding, J.W.,

• Engineering, Electronics and Electrical
• Physics, Electricity and Magnetism
• Physics, Condensed Matter

Identifier

(UMI)AAI9305475

OAI identifier oai:identifier

oai:www.ideals.illinois.edu:2142/71977