Fundamental Mechanisms of Photo-Stimulated Surface Reactions During Laser-Induced and Laser-Assisted Crystal Growth

The use of ultra-violet lasers to alter the chemistry of surfaces during vapor-phase crystal growth and the fundamental mechanisms of these interactions during the growth of thin films has been examined. Three growth techniques have been studied. These are: laser-induced chemical vapor deposition (LCVD), laser-assisted low-pressure chemical vapor deposition (LA-LPCVD), and laser-induced primary-ion deposition.

Name thesis:degree_name

Ph.D.

Level thesis:degree_level

Dissertation

Discipline thesis:degree_discipline

Metallurgical Engineering

Grantor

University of Illinois at Urbana-Champaign

Year dc:date

2014

Author dc:creator

• Lubben, Daniel C.

Contributors dc:contributor

• Greene, J.E.

• Engineering, Materials Science

Identifier

(UMI)AAI8803124

OAI identifier oai:identifier

oai:www.ideals.illinois.edu:2142/71848