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University of Illinois at Urbana-Champaign
The Degradation of Spatial Resolution in Thin Foil X-Ray Microchemical Analysis Due to Plural Scattering of Electrons
Abstract
dc:descriptionA computer-based Monte Carlo simulation of incoherent plural scattering of electrons has been developed in order to estimate the broadening of an electron probe as it propagates through a solid. By applying this approach to modeling the spreading of a fine (50 (ANGSTROM)) probe focused on a thin foil in a scanning transmission electron microscope (STEM), we have estimated the spatial resolution of the compositional analysis obtainable using energy dispersive x-ray spectroscopy (EDS). Specifically, an attempt has been made to determine how the apparent microchemistry of a feature of finer dimensions than the broadened beam differs from the actual composition of the given feature.
Degree
thesis:*- Name thesis:degree_name
- Ph.D.
- Level thesis:degree_level
- Dissertation
- Discipline thesis:degree_discipline
- Metallurgical Engineering
- Grantor
- University of Illinois at Urbana-Champaign
- Year dc:date
- 2014
Author and committee
dc:creator, dc:contributor.*- Author dc:creator
-
- Twigg, Mark Erickson
Subjects
dc:subject × 1Identifiers
dc:identifier.*- Identifier
- (UMI)AAI8303009
- OAI identifier oai:identifier
- oai:www.ideals.illinois.edu:2142/71798