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University of Illinois at Urbana-Champaign
Semiconductor Laser Arrays Grown by Metalorganic Chemical Vapor Deposition
Abstract
dc:descriptionThe metalorganic chemical vapor deposition system (MOCVD) allows for the growth of ultrathin epitaxial layers of III-V semiconductor compounds. This vapor deposition process is well suited for the growth of high performance semiconductor laser structures. Experimental data have been collected on a variety of MOCVD grown laser structures and are presented along with device design criteria.
Degree
thesis:*- Name thesis:degree_name
- Ph.D.
- Level thesis:degree_level
- Dissertation
- Discipline thesis:degree_discipline
- Electrical Engineering
- Grantor
- University of Illinois at Urbana-Champaign
- Year dc:date
- 2014
Author and committee
dc:creator, dc:contributor.*- Author dc:creator
-
- Mawst, Luke
Subjects
dc:subject × 1Identifiers
dc:identifier.*- Identifier
- (UMI)AAI8711834
- OAI identifier oai:identifier
- oai:www.ideals.illinois.edu:2142/69354