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University of Illinois at Urbana-Champaign
Glow Discharge Optical Spectroscopy for Sputtering Diagnostics
Abstract
dc:descriptionMade available in DSpace on 2014-12-14T16:00:38Z (GMT). No. of bitstreams: 1 7821244.pdf: 6923671 bytes, checksum: 475e29fa7d2f2ca6284d17d4b17fe33a (MD5) Previous issue date: 1978
Degree
thesis:*- Name thesis:degree_name
- Ph.D.
- Level thesis:degree_level
- Dissertation
- Discipline thesis:degree_discipline
- Metallurgical Engineering
- Grantor
- University of Illinois at Urbana-Champaign
- Year dc:date
- 2014
Author and committee
dc:creator, dc:contributor.*- Author dc:creator
-
- Sequeda Osorio, Federico
Subjects
dc:subject × 1Rights
- Language dc:language
- eng
Identifiers
dc:identifier.*- Identifier
- (UMI)AAI7821244
- OAI identifier oai:identifier
- oai:www.ideals.illinois.edu:2142/68631