Flexible and foldable single-crystalline silicon electronics for various applications

Much of the existing research in flexible electronic systems based on silicon has focused on improving performance and cost. We are developing soft materials and assembly approaches that enable electronic devices with area coverage, conformal electronics, mechanical properties, or geometrical form features that would be impossible to achieve using traditional, wafer-based technologies. This thesis presents the fabrications of three different ultrathin silicon electronic systems: ultrathin stretchable silicon solar cells, ultrathin strain sensors, and high density neural sensors for mapping brain activity. First, we designed ∼3 μm thick bars of ultrathin silicon PV that include a light trapping structure to maximize light absorption. Next, we modeled strain sensors based on piezoresistivity that offer high sensitivity, lightweight construction, and mechanical flexibility so that they can be used in various applications, including structural health monitoring, tactile image detection, cardiovascular pressure measurement, and many others. Finally, we developed new devices that integrate ultrathin flexible silicon nanomembrane transistors to test neural sensing from significant areas of the brain at high spatial and temporal resolution.

Name thesis:degree_name

M.S.

Level thesis:degree_level

Thesis

Discipline thesis:degree_discipline

Electrical & Computer Engr

Grantor

University of Illinois at Urbana-Champaign

Year dc:date

2014

Author dc:creator

• Lee, Yu Ri

Contributors dc:contributor

• Rogers, John A.

• Ultrathin Stretchable Photovoltaic (PV) with Light Trapping Structure
• Printed Assemblies of Ultrathin Single Crystalline Silicon for Strain Sensor Applications
• High Density Capacitive Neural Interfaces

Statement dc:rights

• Copyright 2014 Yu Ri Lee

Language dc:language

en

Handle dc:identifier

http://hdl.handle.net/2142/50408

OAI identifier oai:identifier

oai:www.ideals.illinois.edu:2142/50408