Experimental study of rare-gases excimer VUV system and H2 Lyman-bands calibration

An electron impact rare gas excimer vacuum ultra-violet experimental system is custom-designed and tested using an argon and H2 mixture. An electron flooding system, i.e. filament, is used as the hot electron source. A SiNx membrane is applied as the entrance foil separating the high vacuum chamber and the test gas chamber. A Custom-designed UV photon intensifier together with high-resolution CCD detector is used to increase the spectrum resolution up to three orders of magnitude higher than previous study. The experimental setting yields sufficiently highly resolved spectrum that could be analyzed in detail. H2 Lyman-bands are used for the spectrum calibration. A Diatomic code is applied as a simulation reference which is proved to be insufficient for accurate calibration. A Comprehensive calibration using experimental spectrum, diatomic simulation and an H2 Atlas is performed, and the result shows that the scaling of the spectrometer and detector is off by 0.08 nm, which is a reasonable number for low resolution spectrometer systems.

Name thesis:degree_name

M.S.

Level thesis:degree_level

Thesis

Discipline thesis:degree_discipline

Mechanical Engineering

Grantor

University of Illinois at Urbana-Champaign

Year dc:date

2012

Author dc:creator

• Ke, Haochen

Contributors dc:contributor

• Glumac, Nick G.

• Excimer
• Rare-gases
• Vacuum Ultra Violet(VUV)
• Vacuum system
• Lyman-band
• Calibration
• Experiment
• Spectrum

Statement dc:rights

• Copyright 2012 Haochen Ke

Language dc:language

en

Handle dc:identifier

http://hdl.handle.net/2142/31011

OAI identifier oai:identifier

oai:www.ideals.illinois.edu:2142/31011