Strain sensor array using printed single crystalline silicon on plastic substrate

This thesis analyzes the piezoresistive effect in metal and semiconductor, discusses the effect of temperature and doping concentration, introduces a newly developed strain gauge using single crystalline silicon on plastic substrate, and describes the Colpitts oscillator that has the potential of wireless data transmission between sensor and data acquisition unit. In general, a metal strain gauge has high flexibility with low sensitivity, whereas the semiconductor strain gauge has high sensitivity with low flexibility. Devices using thin ribbons of single crystalline silicon on plastic show gauge factor of 41 with good flexibility and repeatability. Integrating with PN diodes on the same substrate yields a large area 6 x 6 array that can be used in various applications such as structural health monitoring and cybergloves. The successful fabrication of all active and passive components of the Colpitts oscillator on the same flexible substrate has great promise for future high speed wireless data acquisition systems.

Name thesis:degree_name

M.S.

Level thesis:degree_level

Thesis

Discipline thesis:degree_discipline

Electrical & Computer Engr

Grantor

University of Illinois at Urbana-Champaign

Year dc:date

2011

Author dc:creator

• Won, Sang M.

Contributors dc:contributor

• Rogers, John A.

• strain sensor
• flexible electronic
• radio frequency

Statement dc:rights

• Copyright 2011 Sang M. Won

Language dc:language

en

Handle dc:identifier

http://hdl.handle.net/2142/26359

OAI identifier oai:identifier

oai:www.ideals.illinois.edu:2142/26359