Oxide charge traps and interface states at the silicon-silicon dioxide interface

Meta1-oxide-semiconductor capacitors were fabricated with 2800 A thick dry grown thermal oxides under various conditions to determine the effects of oxidation parameters on oxide charge trapping. Electrons and holes were injected into the oxides by the VUV-bias method. In this method, electron-hole pairs are created at the gate-Si0interface by 2 irradiation with vacuum ultraviolet light of 10.2 eV photon energy. Electrons or holes are injected by applying the appropriate voltage to the gate. The charge trapped at the interface was measured by the capacitance-voltage method and located by the photocurrent-voltage method. The trapped charge was found to be within 100 A of the interface. Trapping kinetics data revealed neutral, donor-like, hole traps with capture cross sections of 6xlO-14cm2 and lxlO-15cm2. In addition, an acceptor-like electron trap with a capture cross section of lxlO-15cm2 was detected in three devices. These traps, after being positively charged by hole capture were efficient electron traps with a capture cross section of 3xlO-13cm2 • Little increase in interface states was observed as a result of trap charging. The annealing behavior of the oxide traps support the model that equates trivalent silicon with the trap with the larger hole capture cross section and non-bridging oxygen with the trap with the smaller hole capture cross section. An analysis of the annealing kinetics is given.

Name thesis:degree_name

Ph.D.

Level thesis:degree_level

Dissertation

Discipline thesis:degree_discipline

Physics

Year dc:date

2011

Author dc:creator

• Stivers, Alan Randolph

Contributors dc:contributor

• Sah, C.T.

• oxide charge traps
• interface states
• silicon-silicon dioxide interface
• metal-oxide-semiconductors
• dry grown thermal oxides
• charge trapping

Statement dc:rights

• 1979 Alan Randolph Stivers

Language dc:language

en

Identifier

409214

OAI identifier oai:identifier

oai:www.ideals.illinois.edu:2142/25528