Transfer printed mechanical MEMS

Made available in DSpace on 2011-05-25T15:07:20Z (GMT). No. of bitstreams: 3 Elgan_Steven.pdf: 3972675 bytes, checksum: e746595b016ab92d64c7728e359f2850 (MD5) Elgan_Steven.docx: 6965133 bytes, checksum: c4d9e06e23d28cfc052ed6f47f19b479 (MD5) license.txt: 4060 bytes, checksum: 3a309b0015c8fc16d111f73a191d514e (MD5)

Name thesis:degree_name

M.S.

Level thesis:degree_level

Thesis

Discipline thesis:degree_discipline

Mechanical Engineering

Grantor

University of Illinois at Urbana-Champaign

Year dc:date

2011

Author dc:creator

• Elgan, Steven L.

Contributors dc:contributor

• Ferreira, Placid M.

• Elastomeric Transfer Printing
• Microelectromechanical systems (MEMS) Assembly
• Bolometer Assembly

Statement dc:rights

• Copyright 2011 Steven L Elgan

Language dc:language

en

Handle dc:identifier

http://hdl.handle.net/2142/24072

OAI identifier oai:identifier

oai:www.ideals.illinois.edu:2142/24072