High precision electrohydrodynamic printing of polymer onto microcantilever sensors

This thesis reports electrohydrodynamic jet printing to deposit 2 – 27 um diameter polymer droplets onto microcantilever sensors. The polymer droplets were deposited as single droplets or organized patterns, with sub-μm control over droplet diameter and position. The droplet size could be controlled through a pulse-modulated source voltage, while droplet position was controlled using a positioning stage. Gravimetry analyzed the polymer droplets by examining the shift in microcantilever resonance frequency resulting from droplet deposition. The resonance shift of 50 - 4130 Hz corresponded to a polymer mass of 4.5 - 135 pg. The electrohydrodynamic method is a precise way to deposit multiple materials onto micromechanical sensors with greater resolution and repeatability than current methods.

Name thesis:degree_name

M.S.

Level thesis:degree_level

Thesis

Discipline thesis:degree_discipline

Mechanical Engineering

Grantor

University of Illinois at Urbana-Champaign

Year dc:date

2011

Author dc:creator

• Pikul, James H.

Contributors dc:contributor

• King, William P.

• Microcantilever
• Sensor
• Electrohydrodynamics
• Polymer Deposition
• Polymer Printing
• Microelectromechanical Systems
• Mass Sensing

Statement dc:rights

• Copyright 2011 James Pikul

Language dc:language

en

Handle dc:identifier

http://hdl.handle.net/2142/24046

OAI identifier oai:identifier

oai:www.ideals.illinois.edu:2142/24046