Back to results
University of Illinois at Urbana-Champaign
Transition metal allyls and hydrides as chemical vapor deposition precursors
Abstract
dc:descriptionThin films of high purity palladium can be prepared at low temperature (250$\sp\circ$C) metal-organic chemical vapor deposition of bis(allyl)palladium or (cyclopentadienyl)(allyl)palladium.
Degree
thesis:*- Name thesis:degree_name
- Ph.D.
- Level thesis:degree_level
- Dissertation
- Discipline thesis:degree_discipline
- Chemistry
- Grantor
- University of Illinois at Urbana-Champaign
- Year dc:date
- 2011
Author and committee
dc:creator, dc:contributor.*- Author dc:creator
-
- Gozum, John Ekrem
Subjects
dc:subject × 3Rights
dc:rights- Statement dc:rights
-
- Copyright 1991 Gozum, John Ekrem
- Language dc:language
- eng
Identifiers
dc:identifier.*- Identifier
-
AAI9136603
(UMI)AAI9136603 - OAI identifier oai:identifier
- oai:www.ideals.illinois.edu:2142/21979