Sinter-patterning of oxide dielectric and high critical transition temperature films by pulsed neodymium:YAG laser

Using metallo-organic precursors formulated based on metal carboxylates, various oxide dielectric films (ZrO$\sb2$, Y$\sb2$O$\sb3$ yttria stabilized zirconium (YSZ)), perovskite based oxide films (BaTiO$\sb3$, SrTiO$\sb3$, CaTiO$\sb3$, YBa$\sb2$Cu$\sb3$O$\sb{\rm 7-x}$), and Bi$\sb4$Ti$\sb3$O$\sb{12}$ film were fabricated by spin coating onto single crystal substrates such as Si, ZrO$\sb2$ and MgO.

Name thesis:degree_name

Ph.D.

Level thesis:degree_level

Dissertation

Discipline thesis:degree_discipline

Materials Engineering

Grantor

University of Illinois at Urbana-Champaign

Year dc:date

2011

Author dc:creator

• Louh, Rong-Fuh

Contributors dc:contributor

• Buchanan, Relva C.

• Engineering, Materials Science

Statement dc:rights

• Copyright 1991 Louh, Rong-Fuh

Language dc:language

eng

Identifier

AAI9210901
(UMI)AAI9210901

OAI identifier oai:identifier

oai:www.ideals.illinois.edu:2142/21337