A hybrid hydrodynamic-Monte Carlo simulation of the transport of neutral radicals in low-pressure remote plasma sources

In low pressure electron cyclotron resonance and remote plasma enhanced chemical vapor deposition reactors (milliTorr to hundreds of milliTorr) the mean free path of excited state neutrals can be commensurate with the vessel dimensions. Deposition species may collide with the wall several times before encountering the substrate. While the movement of these particles is essentially ballistic, the advective flow of the background gas is a significant factor in the determination of the transport of the neutral radicals. To address these conditions, a hybrid hydrodynamic-Monte Carlo model has been developed. The advective flow field is calculated from the mass and momentum equations. Radical transport is then simulated using Monte Carlo techniques that include inelastic collisions with the background species and other MC particles, absorbing or reflective collisions with reactor surfaces, or momentum transfer with the advective fluid.

Name thesis:degree_name

Ph.D.

Level thesis:degree_level

Dissertation

Discipline thesis:degree_discipline

Electrical Engineering

Grantor

University of Illinois at Urbana-Champaign

Year dc:date

2011

Author dc:creator

• Hartig, Michael Joseph

Contributors dc:contributor

• Kushner, Mark J.

• Physics, Fluid and Plasma

Statement dc:rights

• Copyright 1993 Hartig, Michael Joseph

Language dc:language

eng

Identifier

AAI9314875
(UMI)AAI9314875

OAI identifier oai:identifier

oai:www.ideals.illinois.edu:2142/20459