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University of Illinois at Urbana-Champaign
Reactions of monomethylgallium, dimethylgallium, and trimethylgallium on silicon(100) and indium phosphide(100)
Abstract
dc:descriptionU of I Only
Degree
thesis:*- Name thesis:degree_name
- Ph.D.
- Level thesis:degree_level
- Dissertation
- Discipline thesis:degree_discipline
- Chemical Engineering
- Grantor
- University of Illinois at Urbana-Champaign
- Year dc:date
- 2011
Author and committee
dc:creator, dc:contributor.*- Author dc:creator
-
- Lin, Robert
- Contributors dc:contributor
-
- Masel, Richard I.
Subjects
dc:subject × 1Rights
dc:rights- Statement dc:rights
-
- Copyright 1992 Lin, Robert
- Language dc:language
- eng
Identifiers
dc:identifier.*- Identifier
-
AAI9236521
(UMI)AAI9236521 - OAI identifier oai:identifier
- oai:www.ideals.illinois.edu:2142/20168