Coupled phenomena in arrays of microplasma devices and microchannel plasma devices as antennas

Arrays of microcavity and microchannel plasmas with characteristic dimensions of 25-800 micrometer have been generated in glass substrates. To reproducibly fabricate the arrays, glass micromaching using replica molding and micropowder blasting was proposed and demonstrated. The microplasmas were optically and electrically probed in this work. The investigation showed that each plasma is physically separated and yet, under the proper conditions, is optically and/or electrically coupled to its neighbors. In arrays as large as 10 parallel microchannel plasmas, evidence of optical coupling among the channels is observed in the form of strongly enhanced atomic emission which is attributed to electron heating driven by the resonant absorption of scattered radiation. The transition from Townsend-like discharges to abnormal glow-like discharges was observed in arrays of microcavity plasma devices. During the transition, bistable oscillations of visible emission were observed in microcavity plasma devices operating in Ne at pressures of 200-700 Torr. In this situation, the time-varying distribution of charge deposited on a dielectric layer in a dielectric barrier device structure appears to be responsible for the oscillations and coupling. It was also observed, in arrays of microcavity plasma devices with a gap, that free microdischarges interact with bounded microdischarges over a distance of less than 500 micrometer. In addition, this work explored and demonstrated the possibility of using microchannel plasma devices as antennas. The measured transmission of RF signals and theoretical predictions of the plasma conductivity show that metal antennas can be replaced by microchannel plasmas. The simulated results also suggest that MHz domain frequency is required to drive microchannel plasma antennas in a quasi-continuous mode. Operation of microplasma channels as receiving antennas was also observed in a planar microstrip configuration.

Name thesis:degree_name

Ph.D.

Level thesis:degree_level

Dissertation

Discipline thesis:degree_discipline

Electrical & Computer Engr

Grantor

University of Illinois at Urbana-Champaign

Year dc:date

2011

Author dc:creator

• Sung, Seung Hoon

Contributors dc:contributor

• Eden, James G.
• Cangellaris, Andreas C.
• Bernhard, Jennifer T.
• Jain, Kanti
• Park, Sung-Jin

• Microplasmas
• optical coupling
• electrical coupling
• antennas

Statement dc:rights

• Copyright 2010 Seung Hoon Sung

Language dc:language

en

Handle dc:identifier

http://hdl.handle.net/2142/18565

OAI identifier oai:identifier

oai:www.ideals.illinois.edu:2142/18565