Characterization of a molded plastic array of ten microplasma jet devices

Novel microplasma jet devices can be fabricated in plastic substrates using inexpensive tools and materials. A simple molding process used for creating microplasma channels has been developed at the Laboratory for Optical Physics and Engineering. These devices have provided the opportunity to investigate characteristics and potential applications of arrays of microplasma jets. In this thesis, the basic plasma physics in addition to the necessary fabrication and experimental techniques are discussed. Finally, the operating characteristics of a particular type of microplasma jet array are discussed. The results presented have opened the door to realizing large arrays of low-temperature plasma expansions.

Name thesis:degree_name

M.S.

Level thesis:degree_level

Thesis

Discipline thesis:degree_discipline

Electrical & Computer Engr

Grantor

University of Illinois at Urbana-Champaign

Year dc:date

2011

Author dc:creator

• Ma, Jeffrey H.

Contributors dc:contributor

• Eden, James G.

• microplasma jet
• flexible
• transparent
• array
• He microplasma

Statement dc:rights

• Copyright 2010 Jeffrey H. Ma

Language dc:language

en

Handle dc:identifier

http://hdl.handle.net/2142/18544

OAI identifier oai:identifier

oai:www.ideals.illinois.edu:2142/18544