Flexible and transparent microcavity plasma devices: fabricated by polymer-based replica molding technique

The fabrication of flexible and transparent microplasma devices using plastic substrate has explored new avenues in plasma science and technology. A polymer-based replica molding process enables inexpensive and accurate production of microcavities of the devices. Best known as the sources of visible, ultraviolet (UV) and vacuum ultraviolet (VUV) radiation, microplasma devices fabricated by replica molding techniques also show potential applications as transparent and flexible displays, a radiation source for medical phototherapy, and photonic circuit light sources. In this thesis, the basic physics of plasma discharges is discussed and the performance and fabrication of microplasma devices by a replica molding process is presented in detail.

Name thesis:degree_name

M.S.

Level thesis:degree_level

Thesis

Discipline thesis:degree_discipline

Materials Science & Engr

Grantor

University of Illinois at Urbana-Champaign

Year dc:date

2010

Author dc:creator

• Lee, Sung Kun

Contributors dc:contributor

• Eden, James G.

• Flexible
• Transparent
• Microplasma
• Plasma
• Plastic
• Polyethylene terephthalate (PET)
• display
• medical
• replica molding
• RGB color model
• Ultraviolet light

Statement dc:rights

• Copyright 2010 Sung Kun Lee

Language dc:language

en

Handle dc:identifier

http://hdl.handle.net/2142/16152

OAI identifier oai:identifier

oai:www.ideals.illinois.edu:2142/16152