Carbon nanotube strain sensors with wide dynamic range fabricated on flexible substrates by novel processing techniques

Carbon nanotube (CNT) strain sensors on flexible polyimide substrates with novel fabrication techniques have been fabricated. Excimer laser photoablation was used for simultaneous patterning of the CNT layer and the polyimide substrate. A transferring technique utilizing sacrificial etching was used for clear material transfer. Clear patterns free of CNT-polymer composites were made and were successfully transferred to a flexible substrate. The resulting device has a gauge factor of 60, which is comparable to the 50~150 value for silicon strain sensors. The device exhibits a dynamic range of up to 1.5% strain, far superior to the 0.03% of silicon.

Name thesis:degree_name

M.S.

Level thesis:degree_level

Thesis

Discipline thesis:degree_discipline

Electrical & Computer Engr

Grantor

University of Illinois at Urbana-Champaign

Year dc:date

2010

Author dc:creator

• Jin, Hyunjong

Contributors dc:contributor

• Jain, Kanti

• Carbon Nanotube (CNT)
• Strain sensor
• Structural Health Monitoring (SHM)
• Excimer Laser
• Photoablation

Statement dc:rights

• Copyright 2009 Hyunjong Jin

Language dc:language

en

Handle dc:identifier

http://hdl.handle.net/2142/14722

OAI identifier oai:identifier

oai:www.ideals.illinois.edu:2142/14722