Electromechanical behavior of PZT thin film composites for RF-MEMS

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Name thesis:degree_name

M.S.

Level thesis:degree_level

Thesis

Discipline thesis:degree_discipline

Aerospace Engineering

Grantor

University of Illinois at Urbana-Champaign

Year dc:date

2010

Author dc:creator

• Yagnamurthy, Sivakumar N.

Contributors dc:contributor

• Chasiotis, Ioannis

• PZT
• Thin Films
• Mechanical Behavior
• Piezoelectric Behavior

Statement dc:rights

• Copyright 2009 Sivakumar N. Yagnamurthy

Language dc:language

en

Handle dc:identifier

http://hdl.handle.net/2142/14719

OAI identifier oai:identifier

oai:www.ideals.illinois.edu:2142/14719