Microplasma jet devices in quartz

A microplasma jet device provides an efficient way of generating reactive species for the purpose of inactivating microbes. Such devices operate at room temperature and atmospheric pressure and may be used to sterilize medical equipment, treat infections, and disinfect the surface of food. This thesis discusses the fabrication of microplasma jet devices fabricated in fused silica. Previous research has demonstrated successful operation of the microplasma jet devices fabricated from polymers, including materials suitable for 3D printing or micro-molding. However, there are concerns about the long-term sustainability of microplasmas in these materials due to plasma-induced reactivity (such as sputtering) and thermal degradation. The chemical resistivity of fused silica makes it an ideal material to build a practical, long-lasting microplasma jet device.

Name thesis:degree_name

M.S.

Level thesis:degree_level

Thesis

Discipline thesis:degree_discipline

Electrical & Computer Engr

Grantor

University of Illinois Urbana-Champaign

Year dc:date

2025

Author dc:creator

• Jamrozy, Michael Brandon

Contributors dc:contributor

• Eden, J. Gary

• Microplasma
• Room-temperature Plasma
• Plasma Jet Device
• Sterilization

Statement dc:rights

• Copyright 2025 Michael Jamrozy

Language dc:language

en, eng

Handle dc:identifier

https://hdl.handle.net/2142/129639

OAI record oai:identifier

https://www.ideals.illinois.edu/oai-pmh?verb=GetRecord&metadataPrefix=etdms&identifier=oai%3Awww.ideals.illinois.edu%3A2142%2F129639