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University of Illinois at Urbana-Champaign

Material sputtering at low ion energies: From atomistics to engineering models with molecular dynamics, Monte Carlo, and data-driven approaches

dc:creator Tran, Huy Dang

thesis:degree_name Ph.D.

dc:date2024

Abstract

dc:description

Submission original under an indefinite embargo labeled 'Open Access'. The submission was exported from vireo on 2025-03-28 without embargo terms

Degree

thesis:*

Name thesis:degree_name: Ph.D.
Level thesis:degree_level: Dissertation
Discipline thesis:degree_discipline: Aerospace Engineering
Grantor: University of Illinois at Urbana-Champaign
Year dc:date: 2024

Author and committee

dc:creator, dc:contributor.*

Author dc:creator: Tran, Huy Dang
Contributors dc:contributor: Chew, Huck Beng
Rovey, Joshua L
Levin, Deborah
Yalin, Azer P
Williams, John D

Subjects

dc:subject × 7

Rights

dc:rights

Statement dc:rights: Copyright 2024 Huy Tran and Huck Beng Chew
Language dc:language: en, eng

Identifiers

dc:identifier.*

Handle dc:identifier: https://hdl.handle.net/2142/127186
OAI identifier oai:identifier: oai:www.ideals.illinois.edu:2142/127186

Chain of custody

source

Harvested from: University of Illinois - Urbana-Champaign
Base URL: www.ideals.illinois.edu/oai-pmh
Last updated: 2026-07-22
Source record: OAI-PMH GetRecord

related terms

citation

Tran, Huy Dang. Material sputtering at low ion energies: From atomistics to engineering models with molecular dynamics, Monte Carlo, and data-driven approaches. Dissertation thesis, University of Illinois at Urbana-Champaign, 2024. https://hdl.handle.net/2142/127186

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