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University of Illinois at Urbana-Champaign
Studies of Various Aspects of Semiconductor Processing: Thermal Etching, Surface Diffusion, Kinetic Analysis of Rapic Thermal Processing
Degree
thesis:*- Name thesis:degree_name
- M.S. (master's)
- Level thesis:degree_level
- Thesis
- Discipline thesis:degree_discipline
- Chemical Engineering
- Grantor
- University of Illinois at Urbana-Champaign
- Year dc:date
- 2023
Author and committee
dc:creator, dc:contributor.*- Author dc:creator
-
- Ditchfield, Roderick
- Contributors dc:contributor
-
- Seebauer, Edmund G.
Subjects
dc:subject × 2Rights
- Language dc:language
- eng