Interfacial mechanics of strain engineering in thin film capped two-dimensional materials

Spatially varying strains in thin film capped monolayer MoS2 are observed using Raman spectroscopy. We apply a traction-separation model to define the interfacial mechanics which affect the strain distribution. The model is used in finite element analysis (FEA) to directly reveal interfacial mechanisms of strain transfer between the stressor and the two-dimensional material. The developed finite element model accurately reproduces the strain distribution for various stressor geometries observed in experiments, suggesting opportunities to use the model for design and prediction of strains. We also explore the anisotropy of the strain distribution by examining directional strains.

Name thesis:degree_name

M.S.

Level thesis:degree_level

Thesis

Discipline thesis:degree_discipline

Mechanical Engineering

Grantor

University of Illinois at Urbana-Champaign

Year dc:date

2023

Author dc:creator

• Hwang, Kelly

Contributors dc:contributor

• van der Zande, Arend M
• Ertekin, Elif

• Strain Engineering
• Two-dimensional Materials
• Heterogeneous Integration
• Finite Element Modelling
• Cmos Processes

Statement dc:rights

• Copyright 2023 Kelly Hwang

Language dc:language

en, eng

Handle dc:identifier

https://hdl.handle.net/2142/121382

OAI record oai:identifier

https://www.ideals.illinois.edu/oai-pmh?verb=GetRecord&metadataPrefix=etdms&identifier=oai%3Awww.ideals.illinois.edu%3A2142%2F121382