Surface composition analysis of ultra-shallow surface regions in complex multilayers and multicomponent alloys by ion scattering and photoelectron spectroscopy

Cheng, Ming Kit

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University of Illinois at Urbana-Champaign

Surface composition analysis of ultra-shallow surface regions in complex multilayers and multicomponent alloys by ion scattering and photoelectron spectroscopy

dc:creator Cheng, Ming Kit

thesis:degree_name Ph.D.

dc:date2022

Abstract

dc:description

Author requested closed access (OA after 2yrs) in Vireo ETD system

Degree

thesis:*

Name thesis:degree_name: Ph.D.
Level thesis:degree_level: Dissertation
Discipline thesis:degree_discipline: Nuclear, Plasma, Radiolgc Engr
Grantor: University of Illinois at Urbana-Champaign
Year dc:date: 2022

Author and committee

dc:creator, dc:contributor.*

Author dc:creator: Cheng, Ming Kit
Contributors dc:contributor: Allain, Jean Paul
Ruzic, David
Zhang, Yang
Andruczyk, Daniel
Dillon, Shen

Subjects

dc:subject × 1

Engineering

Rights

dc:rights

Language dc:language: en, eng

Identifiers

dc:identifier.*

Handle dc:identifier: http://hdl.handle.net/2142/114096
OAI identifier oai:identifier: oai:www.ideals.illinois.edu:2142/114096

Chain of custody

source

Harvested from: University of Illinois - Urbana-Champaign
Base URL: www.ideals.illinois.edu/oai-pmh
Last updated: 2026-07-22
Source record: OAI-PMH GetRecord

related terms

citation

Cheng, Ming Kit. Surface composition analysis of ultra-shallow surface regions in complex multilayers and multicomponent alloys by ion scattering and photoelectron spectroscopy. Dissertation thesis, University of Illinois at Urbana-Champaign, 2022. http://hdl.handle.net/2142/114096

Surface composition analysis of ultra-shallow surface regions in complex multilayers and multicomponent alloys by ion scattering and photoelectron spectroscopy

Abstract

Degree

Author and committee

Subjects

Rights

Identifiers

Chain of custody

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