Electrohydrodynamic jet printing: droplet to shape writing, and potential applications with 172nm exposure

Electrohydrodynamic jet printing facilitates the deposition of 500nm-30um droplets with high positional accuracy. The University of Illinois at Urbana-Champaign, UIUC, has developed this technique and shown it has many capabilities. Whether the goal is to pattern biologically active chemicals, draw an etch mask, connect complex geometry microscale wires, or one of many other applications, EJET has a place in R&D. Significant effort or training is required to write 500nm-30um droplets, let alone to coalesce droplets into shapes/lines. This thesis includes work to identify how to go beyond the droplet to develop reproducible printed lines and shapes. A detailed procedure for use of the EJET instrument, as well as a qualitative explanation of the EJET process is detailed here. Surface charge dissipation and sample surface preparation were key factors to transition from droplet to line/area writing. Lessons learned for future generations of EJET researchers are documented here. The EJET was used to print inks that were solidified by a novel technique for interesting applications in microfabrication. First chemical compatibility was tested with the solidified ink. Then, the application of the solidified ink as a metal film etch mask and a CF4 isotropic etch mask were explored. With the combination of EJET understanding and this new ink solidification technique, there is a whole new world of potential EJET research.

Name thesis:degree_name

M.S.

Level thesis:degree_level

Thesis

Discipline thesis:degree_discipline

Mechanical Engineering

Grantor

University of Illinois at Urbana-Champaign

Year dc:date

2022

Author dc:creator

• Maduzia, Joseph Walter

Contributors dc:contributor

• Ferreira, Placid M

• Electrohydrodynamic Electrohydrodynamic-jet (E-jet) Electrohydrodynamic-Jet Printing ink film printing 172nm Exposure Electrohydrodynamics Microelectromechanical Systems MNMS Cleanroom Micromanufacturing

Statement dc:rights

• Copyright 20210 Joseph W Maduzia

Language dc:language

en

Handle dc:identifier

http://hdl.handle.net/2142/113227

OAI identifier oai:identifier

oai:www.ideals.illinois.edu:2142/113227