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San Jose State University

Hydrogen redistribution in annealed silicon nitride thin films deposited by PECVD

dc:creator Nagy, Ferenc A
thesis:degree_name Master of Science (MS)

Degree

thesis:*
Name thesis:degree_name
Master of Science (MS)

Author and committee

dc:creator, dc:contributor.*
Author dc:creator
  • Nagy, Ferenc A

Identifiers

dc:identifier.*
Identifier
https://scholarworks.sjsu.edu/etd_theses/1458
OAI identifier oai:identifier
oai:scholarworks.sjsu.edu:etd_theses-2454

Chain of custody

source
Harvested from
San Jose State University
Base URL
scholarworks.sjsu.edu/do/oai/
Last updated
2026-07-27
Source record
OAI-PMH GetRecord
related terms
citation

Nagy, Ferenc A. Hydrogen redistribution in annealed silicon nitride thin films deposited by PECVD. https://doi.org/10.31979/etd.wf7u-geuq

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