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San Jose State University

Microstructure and chemistry of thermal oxide on titanium silicide thin film

Degree

thesis:*
Name thesis:degree_name
Master of Science (MS)

Author and committee

dc:creator, dc:contributor.*
Author dc:creator
  • Chun, Kaynam

Identifiers

dc:identifier.*
OAI identifier oai:identifier
oai:scholarworks.sjsu.edu:etd_theses-2210

Chain of custody

source
Harvested from
San Jose State University
Base URL
scholarworks.sjsu.edu/do/oai/
Last updated
2026-07-27
Source record
OAI-PMH GetRecord
related terms
citation

Chun, Kaynam. Microstructure and chemistry of thermal oxide on titanium silicide thin film. https://doi.org/10.31979/etd.vqpq-9tr2