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San Jose State University

Passivation film damage during focused ion beam IC modification

dc:creator Ge, Jiaming

thesis:degree_name Master of Science (MS)

Degree

thesis:*

Name thesis:degree_name: Master of Science (MS)

Author and committee

dc:creator, dc:contributor.*

Author dc:creator: Ge, Jiaming

Identifiers

dc:identifier.*

Identifier: https://scholarworks.sjsu.edu/etd_theses/539
OAI identifier oai:identifier: oai:scholarworks.sjsu.edu:etd_theses-1535

Chain of custody

source

Harvested from: San Jose State University
Base URL: scholarworks.sjsu.edu/do/oai/
Last updated: 2026-07-27
Source record: OAI-PMH GetRecord

related terms

sjsu

citation

Ge, Jiaming. Passivation film damage during focused ion beam IC modification. https://doi.org/10.31979/etd.mdu2-ymj4

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