Modeling and analysis of thick suspended deep x-ray liga inductors on CMOS/BiCMOS substrate

Modeling and simulation results for two types of 150 μm height air suspended inductors proposed for LIGA fabrication are presented. The inductor substrates used model the TSMC 0.18 μm CMOS/BiCMOS substrates. The RF performance between the suspended structure and the unsuspended counterpart are compared and the advantage of the suspended structures is explored. The potential of LIGA for fabricating high suspended inductors with good performance and for combining these with CMOS/BiCMOS is demonstrated.

Name thesis:degree_name

Master of Science (M.Sc.)

Level thesis:degree_level

Masters

Discipline thesis:degree_discipline

Electrical Engineering

Grantor

University of Saskatchewan

Year dc:date.issued

2006

Author dc:creator

• Yu, Xiaoyang

Advisor dc:contributor.advisor

• Klymyshyn, David M.

• X-ray
• Inductors
• LIGA
• BICMOS

Language dc:language.iso

en_US

Handle dc:identifier.uri

https://hdl.handle.net/10388/etd-07312006-101710

OAI identifier oai:identifier

oai:harvest.usask.ca:10388/etd-07312006-101710