{"id":{"repo_id":"sask","oai_identifier":"oai:harvest.usask.ca:10388/etd-07312006-101710"},"canonical_url":"https://search.dev.ndltd.org/etd/sask/oai:harvest.usask.ca:10388/etd-07312006-101710","repository":{"repo_id":"sask","name":"University of Saskatchewan","base_url":"https://harvest.usask.ca/server/oai/request"},"display":{"title":"Modeling and analysis of thick suspended deep x-ray liga inductors on CMOS/BiCMOS substrate","abstract":"Modeling and simulation results for two types of 150 μm height air suspended inductors proposed for LIGA fabrication are presented. The inductor substrates used model the TSMC 0.18 μm CMOS/BiCMOS substrates. The RF performance between the suspended structure and the unsuspended counterpart are compared and the advantage of the suspended structures is explored. The potential of LIGA for fabricating high suspended inductors with good performance and for combining these with CMOS/BiCMOS is demonstrated.","abstract_html":"Modeling and simulation results for two types of 150 μm height air suspended inductors proposed for LIGA fabrication are presented. The inductor substrates used model the TSMC 0.18 μm CMOS/BiCMOS substrates. The RF performance between the suspended structure and the unsuspended counterpart are compared and the advantage of the suspended structures is explored. The potential of LIGA for fabricating high suspended inductors with good performance and for combining these with CMOS/BiCMOS is demonstrated.","abstract_has_math":false,"creators":["Yu, Xiaoyang"],"institution":"University of Saskatchewan","degree_name":"Master of Science (M.Sc.)","degree_level":"Masters","degree_discipline":"Electrical Engineering","degree_department":null,"school":null,"contributors":[],"advisors":["Klymyshyn, David M."],"committee_chairs":[],"committee_members":[],"year":2006,"date_issued":"2006-05-31","date_published":"2006-05-31","updated_at":"2026-07-24T04:27:16Z","subjects":["X-ray","Inductors","LIGA","BICMOS"],"languages":["en_US"],"rights":[],"rights_urls":[],"identifier_entries":[]},"links":{"outbound_url":"https://hdl.handle.net/10388/etd-07312006-101710","outbound_label":"Handle","outbound_source":"dc:identifier.uri"},"metadata_groups":[{"id":"people","label":"People","entries":[{"key":"dc:contributor.advisor","label":"Advisor","values":["Klymyshyn, David M."]},{"key":"dc:creator","label":"Author","values":["Yu, Xiaoyang"]}]},{"id":"academic_context","label":"Academic Context","entries":[{"key":"dc:date.accessioned","label":"Dc Date Accessioned","values":["2006-07-31T10:17:10Z","2013-01-04T04:49:23Z"]},{"key":"dc:date.available","label":"Dc Date Available","values":["2006-08-02T08:00:00Z","2013-01-04T04:49:23Z"]},{"key":"dc:date.issued","label":"Date","values":["2006-05-31"]},{"key":"thesis:degree_discipline","label":"Discipline","values":["Electrical Engineering"]},{"key":"thesis:degree_level","label":"Degree Level","values":["Masters"]},{"key":"thesis:degree_name","label":"Degree Name","values":["Master of Science (M.Sc.)"]},{"key":"thesis:institution_name","label":"Thesis Institution Name","values":["University of Saskatchewan"]}]},{"id":"subjects_keywords","label":"Subjects and Keywords","entries":[{"key":"dc:subject","label":"Dc Subject","values":["X-ray","Inductors","LIGA","BICMOS"]}]},{"id":"language_rights","label":"Language and Rights","entries":[{"key":"dc:language.iso","label":"Language (ISO)","values":["en_US"]}]},{"id":"identifiers","label":"Identifiers","entries":[{"key":"dc:identifier.uri","label":"Identifier URI","values":["https://hdl.handle.net/10388/etd-07312006-101710"]}]},{"id":"additional","label":"Additional Metadata","entries":[{"key":"dc:description.abstract","label":"Abstract","values":["Modeling and simulation results for two types of 150 μm height air suspended inductors proposed for LIGA fabrication are presented. The inductor substrates used model the TSMC 0.18 μm CMOS/BiCMOS substrates. The RF performance between the suspended structure and the unsuspended counterpart are compared and the advantage of the suspended structures is explored. The potential of LIGA for fabricating high suspended inductors with good performance and for combining these with CMOS/BiCMOS is demonstrated."]},{"key":"dc:title","label":"Title","values":["Modeling and analysis of thick suspended deep x-ray liga inductors on CMOS/BiCMOS substrate"]}]}],"canonical_facts":{"dc:contributor.advisor":["Klymyshyn, David M."],"dc:creator":["Yu, Xiaoyang"],"dc:date.accessioned":["2006-07-31T10:17:10Z","2013-01-04T04:49:23Z"],"dc:date.available":["2006-08-02T08:00:00Z","2013-01-04T04:49:23Z"],"dc:date.issued":["2006-05-31"],"dc:description.abstract":["Modeling and simulation results for two types of 150 μm height air suspended inductors proposed for LIGA fabrication are presented. The inductor substrates used model the TSMC 0.18 μm CMOS/BiCMOS substrates. The RF performance between the suspended structure and the unsuspended counterpart are compared and the advantage of the suspended structures is explored. The potential of LIGA for fabricating high suspended inductors with good performance and for combining these with CMOS/BiCMOS is demonstrated."],"dc:identifier.uri":["https://hdl.handle.net/10388/etd-07312006-101710"],"dc:language.iso":["en_US"],"dc:subject":["X-ray","Inductors","LIGA","BICMOS"],"dc:title":["Modeling and analysis of thick suspended deep x-ray liga inductors on CMOS/BiCMOS substrate"],"thesis:degree_discipline":["Electrical Engineering"],"thesis:degree_level":["Masters"],"thesis:degree_name":["Master of Science (M.Sc.)"],"thesis:institution_name":["University of Saskatchewan"]},"updated_at":"2026-07-24T04:27:16Z"}