Silicon Doping Profile Measurement Using Terahertz Time Domain Spectroscopy

Jen, Chih-Yu

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Rochester Institute of Technology

Silicon Doping Profile Measurement Using Terahertz Time Domain Spectroscopy

dc:creator Jen, Chih-Yu

thesis:degree_name Microsystems Engineering (Ph.D.)

Degree

thesis:*

Name thesis:degree_name: Microsystems Engineering (Ph.D.)
Level thesis:degree_level: Dissertation

Author and committee

dc:creator, dc:contributor.*

Author dc:creator: Jen, Chih-Yu
Contributors dc:contributor: Christiaan Richter

Subjects

dc:subject × 5

Anodic oxidation
Doping profile
Non-contact
Silicon
Terahertz time domain spectroscopy

Identifiers

dc:identifier.*

Repository record dc:identifier: https://repository.rit.edu/theses/8520
OAI identifier oai:identifier: oai:repository.rit.edu:theses-9677

Chain of custody

source

Harvested from: Rochester Institute of Technology
Base URL: repository.rit.edu/do/oai/
Last updated: 2026-07-27
Source record: OAI-PMH GetRecord

related terms

Anodic oxidation
Doping profile
Non-contact
rit
Dissertation

citation

Jen, Chih-Yu. Silicon Doping Profile Measurement Using Terahertz Time Domain Spectroscopy. Dissertation thesis, https://repository.rit.edu/theses/8520

Silicon Doping Profile Measurement Using Terahertz Time Domain Spectroscopy

Degree

Author and committee

Subjects

Identifiers

Chain of custody

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