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Rochester Institute of Technology

Evanescent wave assist features for optical projection lithography

dc:creator Lafferty, Neal

Degree

thesis:*

Level thesis:degree_level: Dissertation

Author and committee

dc:creator, dc:contributor.*

Author dc:creator: Lafferty, Neal
Contributors dc:contributor: Smith, Bruce

Subjects

dc:subject × 3

Identifiers

dc:identifier.*

Repository record dc:identifier: https://repository.rit.edu/theses/7097
OAI identifier oai:identifier: oai:repository.rit.edu:theses-8102

Chain of custody

source

Harvested from: Rochester Institute of Technology
Base URL: repository.rit.edu/do/oai/
Last updated: 2026-07-27
Source record: OAI-PMH GetRecord

related terms

citation

Lafferty, Neal. Evanescent wave assist features for optical projection lithography. Dissertation thesis, https://repository.rit.edu/theses/7097

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