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Rochester Institute of Technology

Excimer laser microlithography at 193 NM

dc:creator Smith, Bruce W.

thesis:degree_name Imaging Science (Ph.D.)

Degree

thesis:*

Name thesis:degree_name: Imaging Science (Ph.D.)
Level thesis:degree_level: Dissertation

Author and committee

dc:creator, dc:contributor.*

Author dc:creator: Smith, Bruce W.
Contributors dc:contributor: Marsh, Dana

Subjects

dc:subject × 2

Identifiers

dc:identifier.*

Repository record dc:identifier: https://repository.rit.edu/theses/3040
OAI identifier oai:identifier: oai:repository.rit.edu:theses-4044

Chain of custody

source

Harvested from: Rochester Institute of Technology
Base URL: repository.rit.edu/do/oai/
Last updated: 2026-07-27
Source record: OAI-PMH GetRecord

related terms

citation

Smith, Bruce W.. Excimer laser microlithography at 193 NM. Dissertation thesis, https://repository.rit.edu/theses/3040

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