Global ETD Search
Search theses and dissertations gathered from participating repositories worldwide. Every result links back to the library that holds it. No account is needed.
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Showing 1 to 9 of 9 for “"microlithography"”.
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Microlithography dynamics
… analysis of semiconductor industry (specifically microlithography) and its role in Information Technology (IT). Following Professor's J.D.Sachs terminology, it would be highly desirable "to distinguish the growth effects of the various [in my case, related to IT, VB] components of economic …
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Modeling and analysis of extrusion-spin coating : an efficient and deterministic photoresist coating method in microlithography
In the fabrication of microelectronic chips, microlithography is used to transfer a pattern of circuit geometry from mask to semiconductor wafer. An important step in this process is the deposition of a thin and uniform layer of photoresist (often called resist) on which the lithographic image is …
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Mesoscale simulation of the photoresist process and hydrogel biosensor array platform indexed by shape
Advances in microlithography have driven the rapid progression of semiconductor technology. However, the number and complexity of issues facing microlithography engineers have also increased significantly. Today, it is neither time nor cost-efficient to run large optimization experiment matrices. …
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Luminescent Characteristics Study of a Mather-Type Dense Plasma Focus and Application to Laser Optical Pumping
… viable high-intensity source for high-throughput microlithography processes.
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Investigation Of High-k Gate Dielectrics And Metals For Mosfet Devices.
Progress in advanced microlithography and deposition techniques have made feasible high- k dielectric materials for MOS transistors. The continued scaling of CMOS devices is pushing the Si-SiO2 to its limit to consider high-k gate dielectrics. The demand for faster, low power, smaller, less …
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A study of solvent-rich environments for evaporation rate control in the extrusion spin coating process
Microlithography is a process used in microchip fabrication to transfer a circuitry pattern onto a silicon wafer. An important step in the process is the deposition of a thin coating of photoresist from which the lithographic mask is made. The photoresist layer is typically 1 [micro]m thick with a …
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Polymers for Next Generation Lithography
Since the invention of microlithography there has been an exponential increase in the speed and performance of electronic devices with smaller and smaller arrays. Since then, the semiconductor industry has relied on electron beam lithography for sub-micron patterning of integrated circuits. …
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Inkless Soft Lithography: Utilizing Immobilized Enzymes and Small Molecules to Pattern Self-Assembled Monolayers Via Catalytic Microcontact Printing
<p>During the past two decades, soft lithographic techniques that circumvent the limitations of photolithography have emerged as important tools for the transfer of patterns with sub-micron dimensions. Among these techniques, microcontact printing (uCP) has shown special promise. In uCP, an …