Präparation von Ni-C-Multischichten und Mischsystemen mit dem PLD-Zweistrahlverfahren und Untersuchung der thermischen Stabilität der Schichtsysteme

The Pulsed Laser Deposition is an established method for the preparation of thin films and nm layer systems. In this work a cross beam PLD system is used as a special development for reduction of macro particle contamination in the growing layer. Two plasma plumes which overlap under a defined angle are produced on separated targets by two synchronized lasers. In the overlapping zone the direction of plasma expansion is changed by interaction of plasma particles. A diaphragm is used to guaranty that only the part of the plasma is deposited on the substrate that has changed the direction of expansion in the interaction zone. Detailed characterizations of plasma properties, deposition and growth conditions were carried out to demonstrate that cross beam PLD is an effective method to reduce macro particle contamination and allows layer growth under reduced energetic loading of the substrate. In the second part of this work cross beam PLD is used to produce Ni/C multilayers and artificial mixtures. The interest is focused on the mechanisms of layer disintegration and structure formation under thermal loading. Possible processes for layer disintegration are discussed on a theoretical background and verified in TEM examinations.

Level thesis:degree_level

thesis.doctoral

Grantor dc:publisher

Technische Universität Dresden

Year

2002

Author dc:creator

• Sewing, Andreas

Contributors dc:contributor

• Pompe, Wolfgang
• Johnson, Robert L.
• Möller, Wolfhard

• Dünne Schichten
• Kohlenstoff
• Laserablation
• Multischichten
• Nickel
• carbon
• multilayer
• pulsed laser deposition
• thin films