Global ETD Search
Search theses and dissertations gathered from participating repositories worldwide. Every result links back to the library that holds it. No account is needed.
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Showing 1 to 9 of 9 for “"Particle Contamination"”.
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Particle contamination of high voltage DC insulators.
Thesis. 1978. Ph.D.--Massachusetts Institute of Technology. Dept. of Electrical Engineering and Computer Science.
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Präparation von Ni-C-Multischichten und Mischsystemen mit dem PLD-Zweistrahlverfahren und Untersuchung der thermischen Stabilität der Schichtsysteme
… as a special development for reduction of macro particle contamination in the growing layer. Two plasma plumes which overlap under a defined angle are produced on separated targets by two synchronized lasers. In the overlapping zone the direction of plasma expansion is changed by interaction of …
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Particle generation in a chemical vapor deposition/plasma-enhanced chemical vapor deposition interlayer dielectric tool
… integration. Material choice, processing, and contamination greatly impact the performance of the layer. In this study, particle generation, deposition, and adhesion mechanisms are reviewed. In particular, four important sources of interlayer dielectric particle contamination were investigated: …
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Design of a robotic water-pipe rehabilitation
… presents an in-pipe robotic system for minimal particle contamination obstruction removal operation of corroded water pipes. It proposes a robotic system with a Manipulation Module and a Compliant Surface Adaptation Module. The Manipulation Module contains a 4-Degree of Freedom robotic …
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Ultrathin silicon wafer bonding physics and applications
… this process is described. A method of detecting particle contamination in chemical baths and other processes using wafer bonding is detailed. A final section highlights some recent work that has used ultrathin silicon wafer bonding to fabricate MEMS devices that have reduced existing design …
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Novel Techniques for Quantifying Secondhand Smoke Diffusion into Children's Bedroom
… the impact of intervention on flow of smoke air particle concentration from the main room where smoking generates air particle contamination to a room where a child living in the home sleeps. The paper also explores potential modelling techniques to proactively identify and the impact of the …
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A wireless robotic manipulator for semiconductor manufacturing equipment
… class 1. However even under these precautions, particle contamination still causes failures in the microchips produced in these environments. One source of these contaminants is the production equipment itself. Particularly, the wire carriers connecting the robots can shed micro particles which …
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Fundamental Study of Particle Formation, Transport, Deposition and Filtration for Semiconductor Applications
… EUV lithography system. As a result, the particle size of interest becomes smaller. Preventing and controlling particle contaminations is essential in the semiconductor manufacturing process to increase semiconductor yield. Examples of these unwanted nanoparticles in the semiconductor …
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Research on Vibration-AE Fusion Detection Technology for Metal Particle Defect in GIS under Electromechanical Coupling Condition
… main causes of GIS failures. For example, metal particle contamination is a typical insulation defect related to mechanical vibration, while AE and vibration signal measurements are effective for detecting insulation and mechanical conditions, respectively. However, traditional single-signal …