Design of a CMOS compatible, athermal, optical waveguide

This paper explores a possible design for a CMOS compatible, athermal, optical waveguide. The design explored is a slot waveguide with light guided in the low index material. A design paradigm is proposed which shows the relationship between cross-sectional parameters and their impact on both the effective index of refraction and the thermo-optic coefficient of the device. Two materials choices were explored to serve as the low index material, poly(ether imide) (PI) and poly(methyl methacrylate) (PMMA). The slot waveguide with PI as the low index material had a simulated, device thermo-optic coefficient of -8.5 x 10-4K-1, and the slot waveguide with PMMA as the low index material had a simulated, device thermo-optic coefficient of 1.7 x 10-5K-1.

Department dc:contributor.department

Massachusetts Institute of Technology. Dept. of Materials Science and Engineering.

Grantor dc:publisher

Massachusetts Institute of Technology

Year dc:date.issued

2007

Author dc:creator

• Fernandez, Luis Enrique, S.B. Massachusetts Institute of Technology

Advisor dc:contributor.advisor

• Lionel C. Kimerling.

• Materials Science and Engineering.

Statement dc:rights

• M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission.

Licence dc:rights.uri

• http://dspace.mit.edu/handle/1721.1/7582

Language dc:language.iso

eng

Handle dc:identifier.uri

http://hdl.handle.net/1721.1/44819

OAI identifier oai:identifier

oai:dspace.mit.edu:1721.1/44819