{"id":{"repo_id":"mit","oai_identifier":"oai:dspace.mit.edu:1721.1/44819"},"canonical_url":"https://search.dev.ndltd.org/etd/mit/oai:dspace.mit.edu:1721.1/44819","repository":{"repo_id":"mit","name":"MIT","base_url":"https://dspace.mit.edu/oai/request"},"display":{"title":"Design of a CMOS compatible, athermal, optical waveguide","abstract":"This paper explores a possible design for a CMOS compatible, athermal, optical waveguide. The design explored is a slot waveguide with light guided in the low index material. A design paradigm is proposed which shows the relationship between cross-sectional parameters and their impact on both the effective index of refraction and the thermo-optic coefficient of the device. Two materials choices were explored to serve as the low index material, poly(ether imide) (PI) and poly(methyl methacrylate) (PMMA). The slot waveguide with PI as the low index material had a simulated, device thermo-optic coefficient of -8.5 x 10-4K-1, and the slot waveguide with PMMA as the low index material had a simulated, device thermo-optic coefficient of 1.7 x 10-5K-1.","abstract_html":"This paper explores a possible design for a CMOS compatible, athermal, optical waveguide. The design explored is a slot waveguide with light guided in the low index material. A design paradigm is proposed which shows the relationship between cross-sectional parameters and their impact on both the effective index of refraction and the thermo-optic coefficient of the device. Two materials choices were explored to serve as the low index material, poly(ether imide) (PI) and poly(methyl methacrylate) (PMMA). The slot waveguide with PI as the low index material had a simulated, device thermo-optic coefficient of -8.5 x 10-4K-1, and the slot waveguide with PMMA as the low index material had a simulated, device thermo-optic coefficient of 1.7 x 10-5K-1.","abstract_has_math":false,"creators":["Fernandez, Luis Enrique, S.B. Massachusetts Institute of Technology"],"institution":"Massachusetts Institute of Technology","degree_name":null,"degree_level":null,"degree_discipline":null,"degree_department":"Massachusetts Institute of Technology. Dept. of Materials Science and Engineering.","school":null,"contributors":[],"advisors":["Lionel C. Kimerling."],"committee_chairs":[],"committee_members":[],"year":2007,"date_issued":"2007","date_published":"2007","updated_at":"2026-07-22T22:22:02Z","subjects":["Materials Science and Engineering."],"languages":["eng"],"rights":["M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission."],"rights_urls":["http://dspace.mit.edu/handle/1721.1/7582"],"identifier_entries":[]},"links":{"outbound_url":"http://hdl.handle.net/1721.1/44819","outbound_label":"Handle","outbound_source":"dc:identifier.uri"},"metadata_groups":[{"id":"people","label":"People","entries":[{"key":"dc:contributor.advisor","label":"Advisor","values":["Lionel C. Kimerling."]},{"key":"dc:contributor.department","label":"Department","values":["Massachusetts Institute of Technology. Dept. of Materials Science and Engineering."]},{"key":"dc:contributor.other","label":"Dc Contributor Other","values":["Massachusetts Institute of Technology. Dept. of Materials Science and Engineering."]},{"key":"dc:creator","label":"Author","values":["Fernandez, Luis Enrique, S.B. Massachusetts Institute of Technology"]}]},{"id":"academic_context","label":"Academic Context","entries":[{"key":"dc:date.accessioned","label":"Dc Date Accessioned","values":["2009-03-16T19:47:27Z"]},{"key":"dc:date.available","label":"Dc Date Available","values":["2009-03-16T19:47:27Z"]},{"key":"dc:date.issued","label":"Date","values":["2007"]},{"key":"dc:publisher","label":"Institution","values":["Massachusetts Institute of Technology"]},{"key":"dc:type","label":"Dc Type","values":["Thesis"]}]},{"id":"subjects_keywords","label":"Subjects and Keywords","entries":[{"key":"dc:subject","label":"Dc Subject","values":["Materials Science and Engineering."]}]},{"id":"language_rights","label":"Language and Rights","entries":[{"key":"dc:language.iso","label":"Language (ISO)","values":["eng"]},{"key":"dc:rights","label":"Dc Rights","values":["M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission."]},{"key":"dc:rights.uri","label":"Rights URI","values":["http://dspace.mit.edu/handle/1721.1/7582"]}]},{"id":"identifiers","label":"Identifiers","entries":[{"key":"dc:identifier.uri","label":"Identifier URI","values":["http://hdl.handle.net/1721.1/44819"]}]},{"id":"additional","label":"Additional Metadata","entries":[{"key":"dc:description","label":"Description","values":["Thesis (S.B.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 2007.","Includes bibliographical references (p. 49)."]},{"key":"dc:description.abstract","label":"Abstract","values":["This paper explores a possible design for a CMOS compatible, athermal, optical waveguide. The design explored is a slot waveguide with light guided in the low index material. A design paradigm is proposed which shows the relationship between cross-sectional parameters and their impact on both the effective index of refraction and the thermo-optic coefficient of the device. Two materials choices were explored to serve as the low index material, poly(ether imide) (PI) and poly(methyl methacrylate) (PMMA). The slot waveguide with PI as the low index material had a simulated, device thermo-optic coefficient of -8.5 x 10-4K-1, and the slot waveguide with PMMA as the low index material had a simulated, device thermo-optic coefficient of 1.7 x 10-5K-1."]},{"key":"dc:description.degree","label":"Dc Description Degree","values":["S.B."]},{"key":"dc:title","label":"Title","values":["Design of a CMOS compatible, athermal, optical waveguide"]}]}],"canonical_facts":{"dc:contributor.advisor":["Lionel C. Kimerling."],"dc:contributor.department":["Massachusetts Institute of Technology. Dept. of Materials Science and Engineering."],"dc:contributor.other":["Massachusetts Institute of Technology. Dept. of Materials Science and Engineering."],"dc:creator":["Fernandez, Luis Enrique, S.B. Massachusetts Institute of Technology"],"dc:date.accessioned":["2009-03-16T19:47:27Z"],"dc:date.available":["2009-03-16T19:47:27Z"],"dc:date.issued":["2007"],"dc:description":["Thesis (S.B.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 2007.","Includes bibliographical references (p. 49)."],"dc:description.abstract":["This paper explores a possible design for a CMOS compatible, athermal, optical waveguide. The design explored is a slot waveguide with light guided in the low index material. A design paradigm is proposed which shows the relationship between cross-sectional parameters and their impact on both the effective index of refraction and the thermo-optic coefficient of the device. Two materials choices were explored to serve as the low index material, poly(ether imide) (PI) and poly(methyl methacrylate) (PMMA). The slot waveguide with PI as the low index material had a simulated, device thermo-optic coefficient of -8.5 x 10-4K-1, and the slot waveguide with PMMA as the low index material had a simulated, device thermo-optic coefficient of 1.7 x 10-5K-1."],"dc:description.degree":["S.B."],"dc:identifier.uri":["http://hdl.handle.net/1721.1/44819"],"dc:language.iso":["eng"],"dc:publisher":["Massachusetts Institute of Technology"],"dc:rights":["M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission."],"dc:rights.uri":["http://dspace.mit.edu/handle/1721.1/7582"],"dc:subject":["Materials Science and Engineering."],"dc:title":["Design of a CMOS compatible, athermal, optical waveguide"],"dc:type":["Thesis"]},"updated_at":"2026-07-22T22:22:02Z"}