Monolithic In-Plane Tunable Optical Filter

This thesis presents the development of a Micro-Electro-Mechanical System (MEMS) monolithic in-plane tunable optical filter in both Indium Phosphide and Silicon. By placing one mirror of a waveguide-based Fabry-Perot interferometer on an electrostatically-actuated beam, a tunable filter is constructed. This is the first demonstration of a waveguide-coupled MEMS tunable optical filter in any material system. Filters with a tuning range of 40 nm from a wavelength 1550 nm with a linewidth of 35 nm are demonstrated. Future work will concentrate on improving the filter's optical characteristics, limited by etch-induced facet roughness, and integration with active photonic devices.

Department dc:contributor.department

Electrical Engineering

Year dc:date.issued

2008

Author dc:creator

• McGee, Jonathan Adam

Advisor dc:contributor.advisor

• Ghodssi, Reza

Language dc:language.iso

en_US

Handle dc:identifier.uri

http://hdl.handle.net/1903/8566

OAI identifier oai:identifier

oai:drum.lib.umd.edu:1903/8566