{"id":{"repo_id":"maryland","oai_identifier":"oai:drum.lib.umd.edu:1903/8566"},"canonical_url":"https://search.dev.ndltd.org/etd/maryland/oai:drum.lib.umd.edu:1903/8566","repository":{"repo_id":"maryland","name":"University of Maryland","base_url":"https://api.drum.lib.umd.edu/server/oai/request"},"display":{"title":"Monolithic In-Plane Tunable Optical Filter","abstract":"This thesis presents the development of a Micro-Electro-Mechanical System (MEMS) monolithic in-plane tunable optical filter in both Indium Phosphide and Silicon. By placing one mirror of a waveguide-based Fabry-Perot interferometer on an electrostatically-actuated beam, a tunable filter is constructed. This is the first demonstration of a waveguide-coupled MEMS tunable optical filter in any material system. Filters with a tuning range of 40 nm from a wavelength 1550 nm with a linewidth of 35 nm are demonstrated. Future work will concentrate on improving the filter's optical characteristics, limited by etch-induced facet roughness, and integration with active photonic devices.","abstract_html":"This thesis presents the development of a Micro-Electro-Mechanical System (MEMS) monolithic in-plane tunable optical filter in both Indium Phosphide and Silicon. By placing one mirror of a waveguide-based Fabry-Perot interferometer on an electrostatically-actuated beam, a tunable filter is constructed. This is the first demonstration of a waveguide-coupled MEMS tunable optical filter in any material system. Filters with a tuning range of 40 nm from a wavelength 1550 nm with a linewidth of 35 nm are demonstrated. Future work will concentrate on improving the filter's optical characteristics, limited by etch-induced facet roughness, and integration with active photonic devices.","abstract_has_math":false,"creators":["McGee, Jonathan Adam"],"institution":null,"degree_name":null,"degree_level":null,"degree_discipline":null,"degree_department":"Electrical Engineering","school":null,"contributors":[],"advisors":["Ghodssi, Reza"],"committee_chairs":[],"committee_members":[],"year":2008,"date_issued":"2008-08-11","date_published":"2008-08-11","updated_at":"2026-07-24T03:02:10Z","subjects":[],"languages":["en_US"],"rights":[],"rights_urls":[],"identifier_entries":[]},"links":{"outbound_url":"http://hdl.handle.net/1903/8566","outbound_label":"Handle","outbound_source":"dc:identifier.uri"},"metadata_groups":[{"id":"people","label":"People","entries":[{"key":"dc:contributor.advisor","label":"Advisor","values":["Ghodssi, Reza"]},{"key":"dc:contributor.department","label":"Department","values":["Electrical Engineering"]},{"key":"dc:creator","label":"Author","values":["McGee, Jonathan Adam"]}]},{"id":"academic_context","label":"Academic Context","entries":[{"key":"dc:date.accessioned","label":"Dc Date Accessioned","values":["2008-10-11T05:44:30Z"]},{"key":"dc:date.available","label":"Dc Date Available","values":["2008-10-11T05:44:30Z"]},{"key":"dc:date.issued","label":"Date","values":["2008-08-11"]},{"key":"dc:type","label":"Dc Type","values":["Thesis"]}]},{"id":"language_rights","label":"Language and Rights","entries":[{"key":"dc:language.iso","label":"Language (ISO)","values":["en_US"]}]},{"id":"identifiers","label":"Identifiers","entries":[{"key":"dc:identifier.uri","label":"Identifier URI","values":["http://hdl.handle.net/1903/8566"]}]},{"id":"additional","label":"Additional Metadata","entries":[{"key":"dc:description.abstract","label":"Abstract","values":["This thesis presents the development of a Micro-Electro-Mechanical System (MEMS) monolithic in-plane tunable optical filter in both Indium Phosphide and Silicon. By placing one mirror of a waveguide-based Fabry-Perot interferometer on an electrostatically-actuated beam, a tunable filter is constructed. This is the first demonstration of a waveguide-coupled MEMS tunable optical filter in any material system. Filters with a tuning range of 40 nm from a wavelength 1550 nm with a linewidth of 35 nm are demonstrated. Future work will concentrate on improving the filter's optical characteristics, limited by etch-induced facet roughness, and integration with active photonic devices."]},{"key":"dc:format.mimetype","label":"Dc Format Mimetype","values":["application/pdf"]},{"key":"dc:title","label":"Title","values":["Monolithic In-Plane Tunable Optical Filter"]}]}],"canonical_facts":{"dc:contributor.advisor":["Ghodssi, Reza"],"dc:contributor.department":["Electrical Engineering"],"dc:creator":["McGee, Jonathan Adam"],"dc:date.accessioned":["2008-10-11T05:44:30Z"],"dc:date.available":["2008-10-11T05:44:30Z"],"dc:date.issued":["2008-08-11"],"dc:description.abstract":["This thesis presents the development of a Micro-Electro-Mechanical System (MEMS) monolithic in-plane tunable optical filter in both Indium Phosphide and Silicon. By placing one mirror of a waveguide-based Fabry-Perot interferometer on an electrostatically-actuated beam, a tunable filter is constructed. This is the first demonstration of a waveguide-coupled MEMS tunable optical filter in any material system. Filters with a tuning range of 40 nm from a wavelength 1550 nm with a linewidth of 35 nm are demonstrated. Future work will concentrate on improving the filter's optical characteristics, limited by etch-induced facet roughness, and integration with active photonic devices."],"dc:format.mimetype":["application/pdf"],"dc:identifier.uri":["http://hdl.handle.net/1903/8566"],"dc:language.iso":["en_US"],"dc:title":["Monolithic In-Plane Tunable Optical Filter"],"dc:type":["Thesis"]},"updated_at":"2026-07-24T03:02:10Z"}