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Northern Polytechnic

The physics of sputtering

Abstract

dc:description.abstract

Early sputtering observations were made in the abnormal glow discharge at pressures around 1 mm Hg and indicated that the mass sputtered per unit charge passed through the discharge tube varied linearly with the cathode fall of potential.

Degree

thesis:*
Name dc:type.qualificationname
other
Level dc:type.qualificationlevel
masters
Grantor dc:publisher.institution
Northern Polytechnic
Year dc:date.issued
1962

Author and committee

dc:creator, dc:contributor.*
Author dc:creator
  • Stocker, B. J.

Subjects

dc:subject × 1

Identifiers

dc:identifier.*
Dc Identifier Grantnumber
N/A
OAI identifier oai:identifier
oai:repository.londonmet.ac.uk:7031

Chain of custody

source
Harvested from
London Metropolitan University
Base URL
repository.londonmet.ac.uk/cgi/oai2
Last updated
2026-07-24
Source record
OAI-PMH GetRecord
citation

Stocker, B. J.. The physics of sputtering. masters thesis, Northern Polytechnic, 1962.