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Iowa State University
The growth of microcrystalline thin films using ECR-PECVD: Silicon and Silicon-Germanium
Degree
thesis:*- Name thesis:degree_name
- Master of Science
- Level thesis:degree_level
- thesis
- Discipline thesis:degree_discipline
- Electrical Engineering
- Department dc:contributor.department
- Department of Electrical and Computer Engineering
- Year dc:date.issued
- 2002
Author and committee
dc:creator, dc:contributor.*- Author dc:creator
-
- Huh, Yung
Rights
- Language dc:language.iso
- en
Identifiers
dc:identifier.*- Identifier
- archive/lib.dr.iastate.edu/rtd/19882/
- OAI identifier oai:identifier
- oai:dr.lib.iastate.edu:20.500.12876/97249